Abstract：
With the input and output data of high-tech industry innovation from 30 provinces in China, based on the three-stage DEA model, this paper analyzes China’s high technology industry innovation efficiency. The main conclusions include that the overall level of innovation efficiency in China’s high-tech industry is somewhat low; the government behavior,regional human capital,and the informationization level have a significantly negative influence on high-tech industry innovation production efficiency, while the regional economic development level and financial support have a significantly positive impact on high-tech industry innovation production efficiency. The further analysis indicates that stripping away the environment factor and random errors, scale efficiency is the main reason to restrict the promotion of innovation efficiency, and a three-stage DEA model is more reasonable than the traditional DEA method and one-phase SFA method to measure the efficiency of high-tech industry innovation production efficiency.
2017 
